Multidimensional interferometric tool for the local probe microscopy nanometrology

0366031 - ÚPT 2012 RIV GB eng J - Journal Article
Hrabina, Jan - Lazar, Josef - Klapetek, P. - Číp, Ondřej
Multidimensional interferometric tool for the local probe microscopy nanometrology.
Measurement Science and Technology. Roč. 22, č. 9 (2011), 094030:1-8. ISSN 0957-0233. E-ISSN 1361-6501
R&D Projects: GA MŠMT(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276
Institutional research plan: CEZ:AV0Z20650511
Keywords : atomic force microscopy (AFM) * nanometrology * nanopositioning interferometry * nanoscale
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.494, year: 2011

This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented.
Permanent Link: http://hdl.handle.net/11104/0201133