Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

0364652 - FZÚ 2012 RIV CH eng J - Journal Article
Suchaneck, G. - Labitzke, R. - Adolphi, B. - Jastrabík, Lubomír - Adámek, Petr - Drahokoupil, Jan - Hubička, Zdeněk - Kiselev, D.A. - Kholkin, A. L. - Gerlach, G. - Dejneka, Alexandr
Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering.
Surface and Coatings Technology. Roč. 205, č. 2 (2011), S241-S244. ISSN 0257-8972
R&D Projects: GA ČR GC202/09/J017; GA AV ČR KAN301370701; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : pulsed DC reactive sputtering * RF reactive sputtering * complex oxide film deposition * polymer substrate
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.867, year: 2011

In this work, Pb(Zr,Ti)O3 (PZT) thin films were deposited onto flexible Cu-coated Kapton® substrates by means of reactive magnetron sputtering for the first time. Different power supplies were selected for each of the 200 mm targets to adjust film composition and substrate ion bombardment. High-power pulse sputtering has been employed for the Zr-target to enhance for formation of nanocrystals, pulsed DC sputtering for the Ti-target to provide a high enough sputter yield, and RF-sputtering for the Pb-target to prevent droplet formation.Observed piezoelectric properties demonstrate that rapid-temperature-annealed films are promising for application in flexible piezoelectric sensors, actuators and power generators.
Permanent Link: http://hdl.handle.net/11104/0200083