Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere

0364640 - FZÚ 2012 RIV CH eng J - Journal Article
Čada, Martin - Hubička, Zdeněk - Adámek, Petr - Klusoň, Jan - Jastrabík, Lubomír
Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere.
Surface and Coatings Technology. Roč. 205, č. 2 (2011), S317-S321. ISSN 0257-8972
R&D Projects: GA ČR GP202/09/P159; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002; GA AV ČR KAN400720701; GA ČR GA202/09/0800
Institutional research plan: CEZ:AV0Z10100522
Keywords : HiPIMS * Langmuir probe * ion flux * reactive sputtering
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.867, year: 2011

A High Power Impulse Magnetron Sputtering System(HiPIMS) equipped with a titanium target 5 cm in diameter has been investigated by means of a time-resolved Langmuir probe and time-resolved ion flux probe. The plasma parameters have been measured in a distance of 70 mm from the target face and below the racetrack. The ion flux at the substrate (placed at the same position as the Langmuir probe) has been determined from the voltage drop across a resistor connected with the planar probe. The planar probe was pulsed at a repetition rate of 50 kHz, duty cycle 50%. The effects of working gas pressure and mean discharge current have been investigated.
Permanent Link: http://hdl.handle.net/11104/0200073