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Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation
- 1.0364639 - FZÚ 2012 RIV CH eng J - Journal Article
Kocourek, Tomáš - Růžek, Michal - Landa, Michal - Jelínek, Miroslav - Mikšovský, Jan - Kopeček, Jaromír
Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation.
Surface and Coatings Technology. Roč. 205, č. 2 (2011), S67-S70. ISSN 0257-8972
R&D Projects: GA ČR(CZ) GA101/09/0702
Institutional research plan: CEZ:AV0Z10100522; CEZ:AV0Z20760514
Keywords : RUS-resonant ultrasound spectroscopy * PLD * diamond-like carbon * elastic properties * AFM nanoindentation
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.867, year: 2011
Elastic properties of diamond-like carbon (DLC) layers with gradient carbon–silicon interlayer were studied by resonant ultrasound spectroscopy (RUS) and standard nano-indentation technique. The DLC layers were prepared by pulsed laser deposition on SiC/Si substrates. The RUS method is based on modal analysis of the specimen vibration. The resonant frequency shifts caused by the layer are for the evaluation of the dynamic inplane elastic properties of the deposited DLC. The results were compared with the quasi-statical quantities - Young's modulus and hardness, obtained by nanoindentation using the AFM tip.
Permanent Link: http://hdl.handle.net/11104/0200072
Number of the records: 1