Conductive gas sensors prepared using PLD

0363985 - FZÚ 2012 RIV NL eng C - Conference Paper (international conference)
Jelínek, Miroslav - Myslík, V. - Vrňata, M. - Fryček, R. - Fitl, P. - Vysloužil, F. - Kocourek, Tomáš
Conductive gas sensors prepared using PLD.
Nanotechnological Basis for Advanced Sensors. Dodrecht: Springer, 2010 - (Reithmaier, J.; Paunovic, P.; Kulisch, W.; Popov, C.; Petkov, P.), s. 390-399. NATO Science for Peace and Security Series B-Physics and Biophysics. ISBN 978-94-007-0902-7.
[NATO-Advanced-Study-Institute Conference on Nanotechnological Basis for Advanced Sensor. Sozopol (BG), 30.05.2010-11.06.2010]
Institutional research plan: CEZ:AV0Z10100520
Keywords : PLD * hybrid PLD * MAPLE * gas sensor * thin film sensor
Subject RIV: BM - Solid Matter Physics ; Magnetism
http://dx.doi.org/10.1007/978-94-007-0903-4_40

This contribution deals with conductive thin film gas sensors fabricated using laser technology. The principle of pulsed laser deposition (PLD) technology is explained. The hybrid PLD systems, based on combination of PLD and magnetron, PLD and RF discharges and PLD from two laser targets, are also presented. Growing layers can be modified by ion beam. Organic films can be grown using cryogenic MAPLE technology. Nanocrystalline and testing of layer properties of gas sensors are given.
Permanent Link: http://hdl.handle.net/11104/0199590