Effect of air annealing on mechanical properties and structure of amorphous B.sub.4./sub.C films

0363873 - FZÚ 2012 RIV CH eng J - Journal Article
Kulykovskyy, Valeriy - Vorlíček, Vladimír - Čtvrtlík, Radim - Boháč, Petr - Jastrabík, Lubomír - Lapšanská, H.
Effect of air annealing on mechanical properties and structure of amorphous B₄C films.
Surface and Coatings Technology. Roč. 205, č. 16 (2011), s. 4052-4057. ISSN 0257-8972
R&D Projects: GA AV ČR KAN301370701; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100520; CEZ:AV0Z10100522
Keywords : amorphous B₄C films * hardness * air annealing * Raman spectra * oxidation
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.867, year: 2011

Amorphous B₄C films were prepared by magnetron sputtering of the hot-pressed B4C target in different regimes. Hardness, intrinsic stress and film structure were investigated in dependence on the annealing temperature in air.Changes in the film structure and composition were investigated by Raman spectroscopy,confocal microscopy, and electron probe microanalysis. It has been shown that an annealing at 500 °C for 1 h leads to stress reduction, slight thickness decrease and increase of film hardness. However already at 600 °C the film oxidation proceeds very intensively with formation of the phases of boron oxide and amorphous carbon in the surface layer. The thickness of the film decreases quickly.
Permanent Link: http://hdl.handle.net/11104/0199503