Mechanical properties of ultrananocryslalline thin films deposited using dual frequency discharges

0359836 - ÚFM 2012 RIV CZ eng J - Journal Article
Buršíková, V. - Bláhová, O. - Karásková, M. - Zajíčková, L. - Jašek, O. - Franta, D. - Klapetek, P. - Buršík, Jiří
Mechanical properties of ultrananocryslalline thin films deposited using dual frequency discharges.
Chemické listy. Roč. 105, - (2011), s. 98-101. ISSN 0009-2770. E-ISSN 1213-7103.
[Lokální mechanické vlastnosti ´07. Brno, 07.11.2007-09.11.2007]
Institutional research plan: CEZ:AV0Z20410507
Keywords : ultrananocryslalline diamond * plasma enhanced chemical vapor deposition * dual frequency discharge
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 0.529, year: 2011

The preparation of nanostructured (nanocomposite or nanocrystalline) diamond coatings is studied due to their extreme mechanical hardness and wear resistance, high bulk modulus, low compressibility, high thermal conductivity, low thermal expansion coefficient , broad optical transparency from the deep ultraviolet to the far infrared, high electrical resistivity, biocompatibility, etc. Their main advantage compared to the polycrystalline diamond film is, that they can be prepared with relatively low surface roughness. The mechanical properties such as hardness, fracture toughness, film-substrate adhesion and thermomechanical stability of the coating-substrate system play always a crucial role for industrial applications of the coatings. Therefore the main aim of the present work is to study the mechanical properties of ultrananocrystalline thin films using two different indentation techniques.
Permanent Link: http://hdl.handle.net/11104/0197542