Synhesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch

0354505 - ÚFM 2011 RIV US eng J - Journal Article
Zajíčková, L. - Jašek, O. - Eliáš, M. - Synek, P. - Lazar, L. - Schneeweiss, Oldřich - Hanzlíková, Renáta
Synhesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch.
Pure and Applied Chemistry. Roč. 82, č. 6 (2010), s. 1259-1272. ISSN 0033-4545. E-ISSN 1365-3075
Institutional research plan: CEZ:AV0Z20410507; CEZ:AV0Z20650511
Keywords : carbon * nanotubes * synthesis
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 2.128, year: 2010

There are many different techniques for the synthesis of carbon nanotubes (CNTs), and plasma technologies experience a significant competitor in thermal chemical vapor deposition (CVD) processes. A particular process is, therefore, selected according to the specific requirements of an application, which clearly differ for the development of composites as compared to nanoelectronics, field emission, displays, sensors, and the like. This paper discusses the method for the synthesis of CNTs using an atmospheric-pressure microwave (MW) torch. It was successfully applied in the fast deposition of multiwalled nanotubes (MWNTs) on a substrate without the necessity of any vacuum or heating equipment. Dense straight-standing nanotubes were prepared on Si substrates with and also without barrier Si Ox layer. Therefore, it was possible to produce CNTs directly on conductive Si and to use them as an electron-emitting electrode of the gas pressure sensor.
Permanent Link: http://hdl.handle.net/11104/0193490