Accurate and Easy-to-use Electron Optical Design Program for Microscopy

0353047 - ÚPT 2011 RIV BR eng C - Conference Paper (international conference)
Zlámal, J. - Lencová, Bohumila
Accurate and Easy-to-use Electron Optical Design Program for Microscopy.
Proceedings of the 17th IFSM International Microscopy Congress. Rio de Janeiro: Sociedade Brasileira de Microscopia e Microanilise, 2010, I1.6:1-2. ISBN 978-85-63273-06-2.
[International Microscopy Congress (IMC17) /17./. Rio de Janeiro (BR), 19.09.2010-24.09.2010]
R&D Projects: GA AV ČR IAA100650805
Institutional research plan: CEZ:AV0Z20650511
Keywords : EOD * FEM * Windows
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Finite Element Method (FEM) has become the universal method for computing 2D potentials in rotationally symmetric electrostatic and saturated magnetic lenses, electrostatic multipoles and magnetic deflection coils inside lenses. For all these elements optimum methods for computing the first order FEM equations were derived, fast solution algorithms implemented and an option for accuracy evaluation of lens field added. Determination of the optical properties is complemented with high accuracy ray tracing which allows extracting the aberration coefficients of up to the 5th order from the ray-traced results.
Permanent Link: http://hdl.handle.net/11104/0192397