Detection of Secondary Electrons by Scintillation Detector in Variable Pressure Scanning Electron Microscopes

0353046 - ÚPT 2011 RIV BR eng C - Conference Paper (international conference)
Jirák, J. - Čudek, P. - Neděla, Vilém
Detection of Secondary Electrons by Scintillation Detector in Variable Pressure Scanning Electron Microscopes.
Proceedings of the 17th IFSM International Microscopy Congress. Rio de Janeiro: Sociedade Brasileira de Microscopia e Microanilise, 2010, I10.14: 1-2. ISBN 978-85-63273-06-2.
[International Microscopy Congress (IMC17) /17./. Rio de Janeiro (BR), 19.09.2010-24.09.2010]
R&D Projects: GA ČR GAP102/10/1410
Institutional research plan: CEZ:AV0Z20650511
Keywords : VPSEM * scintillation detector
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Detection of signal electrons at a higher pressure in the specimen chamber of a variable pressure scanning electron microscope (VP SEM) is commonly based on ionization and scintillation types of detectors. Detection of secondary electrons by the scintillation detector requires adding a voltage up to 10 kV to the scintillator. Secondary electrons accelerated in an electric field with this voltage acquire sufficient energy to generate photons in the scintillation material. Because of problems with electric discharges originating at higher pressures of gases in the specimen chamber of VP SEM, the scintillator of the secondary electron detector has to be positioned in a special room with a pressure up to several Pa, while pressures in the specimen chamber may reach 1 000 Pa. Such detectors where the scintillator is placed in a separately evaporated room were published by Slowko and Jacka et al.
Permanent Link: http://hdl.handle.net/11104/0192396