Newly Designed Ionisation Secondary Electron Detector with Electrostatic Separators for VP-ESEM

0353039 - ÚPT 2011 RIV BR eng C - Conference Paper (international conference)
Neděla, Vilém - Jirák, J.
Newly Designed Ionisation Secondary Electron Detector with Electrostatic Separators for VP-ESEM.
Proceedings of the 17th IFSM International Microscopy Congress. Rio de Janeiro: Sociedade Brasileira de Microscopia e Microanilise, 2010, I10.9: 1-2. ISBN 978-85-63273-06-2.
[International Microscopy Congress (IMC17) /17./. Rio de Janeiro (BR), 19.09.2010-24.09.2010]
R&D Projects: GA ČR GAP102/10/1410
Institutional research plan: CEZ:AV0Z20650511
Keywords : ISEDS * VPSEM * ESEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The basic philosophy of our improved ionization SE detector with electrostatic separators (ISEDS), is to optimize the physical principles of the detection in VPSEM or ESEM in order to achieve a higher purity of the secondary electron (SE) signal with a minimum of backscattered electrons (BSEs) and primary electrons (PEs) contribution and enable detection of this signal depending on energy, eventually on spatial distribution of signal electrons emitted from a sample.
Permanent Link: http://hdl.handle.net/11104/0192389