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Effect of Hydrogen on the Properties of Amorphous Carbon Nitride Films
- 1.0352948 - ÚPT 2011 RIV CN eng C - Conference Paper (international conference)
Mikmeková, Eliška - Urbánek, Michal - Fořt, Tomáš - Di Mundo, R. … Total 5 authors
Effect of Hydrogen on the Properties of Amorphous Carbon Nitride Films.
2010 International Conference on Manufacturing Science and Technology (ICMST 2010). Chengdu: Institute of Electrical and Electronics Engineers, Inc, 2010, s. 291-295. ISBN 978-1-4244-8759-2.
[International Conference on Manufacturing Science and Technology - ICMST 2010. Kuala Lumpur (MY), 26.11.2010-28.11.2010]
Institutional research plan: CEZ:AV0Z20650511
Keywords : hydrogenated alfa-CNx films * ressidal stress * r. f. magnetron sputtering * SLEEM * XPS * TDMS * AFM
Subject RIV: JI - Composite Materials
rf - The effect of hydrogen on the properties of amorphous carbon nitride films deposited onto Si substrates by magnetron sputtering device has been studied.
Permanent Link: http://hdl.handle.net/11104/0192321
Number of the records: 1