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Education and research at clean room laboratory for silicon device technology at Masaryk University

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    0352495 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
    Mikulík, P. - Humlíček, J. - Kulha, P. - Hovorka, Miloš - Kadlec, Filip
    Education and research at clean room laboratory for silicon device technology at Masaryk University.
    12th Scientific and Business Conference SILICON 2010. Rožnov pod Radhoštěm: TECON Scientific s.r.o, 2010, s. 455-456. ISBN 978-80-254-7361-0.
    [SILICON 2010 /12./. Rožnov pod Radhoštěm (CZ), 02.11.2010-05.11.2010]
    R&D Projects: GA AV ČR(CZ) IAA100100907
    Institutional research plan: CEZ:AV0Z20650511; CEZ:AV0Z10100520
    Keywords : clean room * microelectronic * silicon device technology
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

    We present education and research at university clean room microelectronics laboratory for silicon device technology opened at Masaryk University in 2007. T
    Permanent Link: http://hdl.handle.net/11104/0191990

     
     
Number of the records: 1  

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