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Modification of the Schottky FE ZrO/W electron emitter
- 1.0352423 - ÚPT 2011 RIV BR eng C - Conference Paper (international conference)
Matějka, František - Horáček, Miroslav - Kolařík, Vladimír - Král, Stanislav
Modification of the Schottky FE ZrO/W electron emitter.
Proceedings of the 17th IFSM International Microscopy Congress. Rio de Janeiro: Sociedade Brasileira de Microscopia e Microanilise, 2010, I1.12: 1-2. ISBN 978-85-63273-06-2.
[International Microscopy Congress (IMC17) /17./. Rio de Janeiro (BR), 19.09.2010-24.09.2010]
R&D Projects: GA AV ČR IAA100650803; GA MPO FR-TI1/576; GA MŠMT ED0017/01/01
Institutional research plan: CEZ:AV0Z20650511
Keywords : e-beam writing system * rectangular-shaped electron beam * point projection
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
A Schottky electron emitter with a layer of ZrOx is used in our e-beam writing system working with a rectangular-shaped electron beam. The low radius of the tip less than 300 nm is necessary for the proper function of the electron-optical system based on the principle of point projection.
Permanent Link: http://hdl.handle.net/11104/0191931
Number of the records: 1