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Advances in Low Energy Scanning Electron Microscopy

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    0352422 - ÚPT 2011 RIV BR eng C - Conference Paper (international conference)
    Müllerová, Ilona - Hovorka, Miloš - Frank, Luděk
    Advances in Low Energy Scanning Electron Microscopy.
    Proceedings of the 17th IFSM International Microscopy Congress. Rio de Janeiro: Sociedade Brasileira de Microscopia e Microanilise, 2010, s. 256-257. ISBN 978-85-63273-06-2.
    [International Microscopy Congress (IMC17) /17./. Rio de Janeiro (BR), 19.09.2010-24.09.2010]
    R&D Projects: GA AV ČR IAA100650902
    Institutional research plan: CEZ:AV0Z20650511
    Keywords : electron microscopy * cathode lens * slow backscattered electrons * STEM * VLESTEM
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

    Among traditional methods of the electron microscopy (EM) the transmission EM operates at highest energies of electrons and the sample used to be immersed in strong magnetic field. The emission EM has its sample emitting very slow electrons in strong electric field of the cathode lens (CL). The conventional scanning EM (SEM) worked in the medium energy range with the sample in a field free space. Immersion of the SEM sample into magnetic field (and correction of aberrations) improved the resolution up to observation of single atoms. When transferring the CL principle into the SEM we preserve a small primary spot down to lowest energies with the electric field strength as a factor limiting the resolution.
    Permanent Link: http://hdl.handle.net/11104/0191930

     
     
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