Low Energy Reflection and High Angle Reflection of Electrons in the SEM

0352416 - ÚPT 2011 RIV BR eng C - Conference Paper (international conference)
Mikmeková, Šárka - Hovorka, Miloš - Müllerová, Ilona - Frank, Luděk
Low Energy Reflection and High Angle Reflection of Electrons in the SEM.
Proceedings of the 17th IFSM International Microscopy Congress. Rio de Janeiro: Sociedade Brasileira de Microscopia e Microanilise, 2010, I3.7: 1-2. ISBN 978-85-63273-06-2.
[International Microscopy Congress (IMC17) /17./. Rio de Janeiro (BR), 19.09.2010-24.09.2010]
R&D Projects: GA MŠMT OE08012
Institutional research plan: CEZ:AV0Z20650511
Keywords : scanning electron microscopy * crystallinic structure * slow backscattered electrons
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

An important role of the scanning electron microscopy (SEM) is to image and examine the local crystallinic structure of materials. As an alternative to the traditional EBSD method, suffering from slow data collection and limited lateral resolution, employment of very slow backscattered electrons (BSE) and of BSE leaving the sample at high angles with respect to the surface normal appears very promising. Neither of these signals is available in conventional SEM devices as the former species have insufficient energy to be detected while the later usually miss the detector.
Permanent Link: http://hdl.handle.net/11104/0191924