Interferometric nanocomparator for calibrating precision displacement sensors

0352218 - ÚPT 2011 RIV US eng C - Conference Paper (international conference)
Čížek, Martin - Buchta, Zdeněk - Mikel, Břetislav - Lazar, Josef - Číp, Ondřej
Interferometric nanocomparator for calibrating precision displacement sensors.
Interferometry XV: Applications (Proceedings of SPIE Vol. 7791). Bellingham: SPIE, 2010, 77910N: 1-7. ISBN 978-0-8194-8287-7.
[Interferometry /15./. San Diego (US), 02.08.2010]
Institutional research plan: CEZ:AV0Z20650511
Keywords : interferometry * nanometrology * calibration
Subject RIV: BH - Optics, Masers, Lasers

Presented work deals with the description of a novel interferometric nanocomparator intended for calibrating displacement sensors with nanometer resolution used in precision engineering. The nanocomparator is based on a 633 nm laser homodyne interferometer with 2-pass measuring arm. Digital signal filtering increases the SNR and allows achieving sub-nanometer resolution of interferometric measurements. High dynamic range of the measuring mirror displacement is achieved using a two-stage positioning system formed of a linear guide way and piezoelectric actuators. A linear guide way is used for positioning over a 100 mm range with 50 nm resolution. Piezoelectric actuators linked in a closed loop locked to the interferometer value are used for fine positioning with better than 1 nm resolution over a 5 um range.
Permanent Link: http://hdl.handle.net/11104/0191782