Laser interference nano-comparator for length sensor calibration in nanometric scale

0352200 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
Číp, Ondřej - Mikel, Břetislav - Čížek, Martin - Šmíd, Radek - Buchta, Zdeněk - Lazar, Josef
Laser interference nano-comparator for length sensor calibration in nanometric scale.
2nd International Conference NANOCON 2010. Ostrava: Tanger s.r.o, 2010, s. 274-277. ISBN 978-80-87294-19-2.
[NANOCON 2010. International Conference /2./. Olomouc (CZ), 12.10.2010-14.10.2010]
R&D Projects: GA MŠMT(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276; GA MPO FR-TI1/241; GA ČR GAP102/10/1813
Institutional research plan: CEZ:AV0Z20650511
Keywords : nanoscale * precise measurement * laser * interferometer
Subject RIV: BH - Optics, Masers, Lasers

In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of the measuring probe is in order of nanometers. The gauge works fully self-controlled and it is equipped by control software which is able to calibrate wide area of transducers. We put main stress to compensating of thermal dilatation of the gauge body and to eliminating of imperfection of linear guide ways which are used for positioning of the testing probe of the gauge. The work presents the first records of scale calibration of an incremental transducer.
Permanent Link: http://hdl.handle.net/11104/0191769