3D characterization of material structure using scanning electron microscopy (SEM) and focused ion beam (FIB)

0351718 - FZÚ 2011 RIV CZ eng C - Conference Paper (international conference)
Hradilová, Monika - Jäger, Aleš - Lejček, Pavel
3D characterization of material structure using scanning electron microscopy (SEM) and focused ion beam (FIB).
Metal 2010 - 19th international conference on metallurgy and materials. Ostrava: Tanger s.r.o, 2010, s. 152-153. ISBN 978-80-87294-15-4.
[Metal 2010. Rožnov pod Radhoštěm (CZ), 18.05.2010-20.05.2010]
Institutional research plan: CEZ:AV0Z10100520
Keywords : scanning electron microscopy * focused ion beam * 3D characterization
Subject RIV: BM - Solid Matter Physics ; Magnetism

The possibilities of analysis can be enhanced by utilizing focused ion beam (FIB). The FIB instrument allows revealing the structure in the third dimension by controlled and precise milling of the material. In combination with electron beam and suitable detector is possible to describe crystallography (EBSD) or chemical composition (EDS) etc. in three dimensions (3D). Thus, it is feasible to define real size, shape and distribution of microstructure features such as grains, grain boundaries, phases, precipitates and micropores.
Permanent Link: http://hdl.handle.net/11104/0191410