Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model

0350874 - ÚPT 2011 RIV GB eng J - Journal Article
Navrátil, Z. - Dvořák, P. - Brzobohatý, Oto - Trunec, D.
Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model.
Journal of Physics D-Applied Physics. Roč. 43, Nov 3 (2010), 505203:1-11. ISSN 0022-3727. E-ISSN 1361-6463
R&D Projects: GA ČR GA202/07/1669
Institutional research plan: CEZ:AV0Z20650511
Keywords : electron temperature * electron density * optical emission spectroscopy * collisional–radiative model
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 2.105, year: 2010

A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional–radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional–radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional article-in-cell/Monte Carlo (PIC/MC) simulation.
Permanent Link: http://hdl.handle.net/11104/0190757