Comparison of techniques for diffraction grating topography analysis

0350662 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
Matějka, Milan - Rek, Antonín - Mika, Filip - Fořt, Tomáš - Matějková, Jiřina
Comparison of techniques for diffraction grating topography analysis.
Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010 - (Mika, F.), s. 29-32. ISBN 978-80-254-6842-5.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./. Skalský dvůr (CZ), 31.05.2010-04.06.2010]
Institutional research plan: CEZ:AV0Z20650511
Keywords : Atomic Force Microscopy * AEM * Scanning Electron Microscopy * SEM * topography imaging
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://arl-repository.lib.cas.cz/uloziste_av/UPT-D/cav_un_epca-0350662_01.pdf

There are a wide range of analytical techniques which may be used for surface structure characterization. For high resolution surface investigations, two commonly used techniques are Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM). Both techniques are capable resolve surface structure down to the nanometer in scale. However the mechanism of topography imaging and type of information acquired is different.
Permanent Link: http://hdl.handle.net/11104/0190602