Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system

0349454 - FZÚ 2011 RIV GB eng J - Journal Article
Fendrych, František - Taylor, Andrew - Peksa, Ladislav - Kratochvílová, Irena - Vlček, J. - Řezáčová, V. - Petrák, V. - Kluiber, Z. - Fekete, Ladislav - Liehr, M. - Nesládek, M.
Growth and characterization of nanodiamond layers prepared using plasma enhanced linear antennas microwave CVD system.
Journal of Physics D-Applied Physics. Roč. 43, č. 37 (2010), 374018/1-374018/6. ISSN 0022-3727. E-ISSN 1361-6463
R&D Projects: GA AV ČR KAN200100801; GA AV ČR KAN300100801; GA AV ČR KAN301370701
Institutional research plan: CEZ:AV0Z10100520
Keywords : nanodiamond, * thin films * PE MW CVD * linear antennas
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 2.105, year: 2010

Industrial applications of PE CVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high-density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 1011 cm-3), accompanied by data from OES for CH4 – CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown.
Permanent Link: http://hdl.handle.net/11104/0189690