High hydrogen dilution and low substrate temperature cause columnar growth of hydrogenated amorphous silicon

0347839 - FZÚ 2011 RIV DE eng J - Journal Article
Bronsveld, P.C.P. - Mates, Tomáš - Fejfar, Antonín - Kočka, Jan - Rath, J.K. - Schropp, R.E.I.
High hydrogen dilution and low substrate temperature cause columnar growth of hydrogenated amorphous silicon.
Physica Status Solidi A. Roč. 207, č. 3 (2010), s. 525-529. ISSN 1862-6300. E-ISSN 1862-6319
R&D Projects: GA MŠMT(CZ) LC06040; GA AV ČR KAN400100701; GA MŠMT LC510
Institutional research plan: CEZ:AV0Z10100521
Keywords : hydrogenated amorphous silicon * columnar growth * cross-sectional transmission electron microscope (X-TEM]
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.458, year: 2010
http://dx.doi.org/10.1002/pssa.200982847

Columnar growth was observed in the amorphous part of mixed phase layers deposited at very low substrate temperatures. The width of the columns and the layer thickness at which they are first distinguishable in a cross-sectional transmission electron microscope (X-TEM) image, about 120 nm, is similar for the substrate temperature range of 40–100 °C, but the columns are less well developed when either the substrate temperature is increased or the dilution ratio is lowered. This growth behaviour and the incubation layer are attributed to hydrogen-induced surface diffusion of growth precursors resulting in an amorphous–amorphous roughness transition.
Permanent Link: http://hdl.handle.net/11104/0188523