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Novel approach to material evaluation of thin surface layers by resonant ultrasound spectroscopy
- 1.0342304 - ÚT 2011 RIV BE eng J - Journal Article
Landa, Michal - Růžek, Michal - Sedlák, Petr - Seiner, Hanuš - Bodnárová, Lucie - Zídek, Jan
Novel approach to material evaluation of thin surface layers by resonant ultrasound spectroscopy.
Journal of Physics: Conference Series. Roč. 214, č. 1 (2010), s. 1-5. ISSN 1742-6588. E-ISSN 1742-6596.
[International Conference on Photoacoustic and Photothermal Phenomena /15./. Leuven, 19.07.2009-23.07.2009]
R&D Projects: GA ČR(CZ) GA101/09/0702
Institutional research plan: CEZ:AV0Z20760514
Keywords : resonant ultrasound spectroscopy (RUS) * thin films * DLC
Subject RIV: BI - Acoustics
http://iopscience.iop.org/1742-6596/214/1/012045/
The laser-based modal resonant ultrasound spectroscopy is modified for measurements of thin surface layers on a substrate. This paper describes determination of all in-plane elastic properties of thin layers from small resonant frequency shifts of substrate induced by deposition of the layer.
Permanent Link: http://hdl.handle.net/11104/0185069
Number of the records: 1