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Spatial coherence profilometry on tilted surfaces
- 1.0340740 - FZÚ 2010 RIV US eng J - Journal Article
Pavlíček, Pavel - Halouzka, M. - Duan, Z. - Takeda, M.
Spatial coherence profilometry on tilted surfaces.
Applied Optics. Roč. 48, č. 34 (2009), H40-H47. ISSN 0003-6935
R&D Projects: GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : tilted surface * spatial coherence profilometry * spatial coherence * measurement error * shape measurement
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.410, year: 2009
The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light interferometry.
Permanent Link: http://hdl.handle.net/11104/0183922
Number of the records: 1