Selective area deposition of diamond structures

0339576 - FZÚ 2010 RIV SK eng C - Conference Paper (international conference)
Babchenko, Oleg - Kromka, Alexander - Hruška, Karel - Vaněček, Milan
Selective area deposition of diamond structures.
Proceedings of the 15th International Conference on Applied Physics of Condensed Matter. Zilina: University of Zilina, 2009 - (Pudiš, J.; Harmatha, L.; Müllerová, J.; Jamnický, I.), s. 251-255. ISBN 978-80-554-0057-0.
[International Conference on Applied Physics of Condensed Matter /15./ (APCOM 2009). Bystrá, Liptovský Ján (SK), 24.06.2009-26.06.2009]
R&D Projects: GA AV ČR KAN400100701; GA MŠMT LC510
Institutional research plan: CEZ:AV0Z10100521
Keywords : selective area deposition * plasma etching * polymer mask
Subject RIV: BM - Solid Matter Physics ; Magnetism

The report is about selective area deposition of diamond structures after the reactive ion etching and using a photo-resist as mask.
Permanent Link: http://hdl.handle.net/11104/0183063