Deposition of PZT thin films on copper-coated polymer foils

0337271 - FZÚ 2010 RIV US eng C - Conference Paper (international conference)
Suchaneck, G. - Hubička, Zdeněk - Jastrabík, Lubomír - Dejneka, Alexandr - Kiselev, D. - Bdikin, I. - Kholkin, A. - Gerlach, G.
Deposition of PZT thin films on copper-coated polymer foils.
[Depozice PZT tenkých vrstev na poměděné polymerové folie.]
Relability and Properties of Electronic Devices on Flexible Substrates (Simposium I at the 2008 MRS Fall Meeting). Warrendale, PA: MRS, 2009 - (Greer, J.; Vlassak, J.; Daniel, J.; Tsui, T.), I0305/1-I0305/2. Materials Research Society Symposium Proceedings, 1116. ISBN 9781615673834.
[Materials Research Society Fall Meeting. Boston (US), 01.12.2008-05.12.2008]
R&D Projects: GA ČR GA202/08/1009; GA AV ČR KJB100100703
Institutional research plan: CEZ:AV0Z10100522
Keywords : PZT on polymer-foils * RF-modulated plasma jet system
Subject RIV: BM - Solid Matter Physics ; Magnetism
http://www.proceedings.com/06086.html

In this work, we investigate the deposition of Pb(Zr,Ti)O3 (PZT) thin films directly onto copper-coated polymer foils. (111)-textured PZT was fabricated on these flexible substrates by means of a RF-modulated plasma jet system comprising a hollow cathode for reactive sputtering. Film composition and microstructure as well as piezoelectric and dielectric film properties were investigated. The deposited films are suitable as embedded capacitors as well as flexible piezoelectric sensors, actuators and power generators.

Byly zkoumány možnosti depozice vrstev Pb(Zn,TiO3) (PZT) přímo na poměděné polymerní folii.(111)-texturované vrstvy PZT se nanášely na tyto flexibilní substráty pomocí RF-modulovaného plasma-jet systému s dutou katodou. Také bylo zkoumáno složení vrstev a jejich mikrostruktura, dielektrické a piezoelektrické vlastnosti. Bylo zjištěno, že takto připravené vrstvy jsou vhodné pro použití v moderní flexoelektronice.
Permanent Link: http://hdl.handle.net/11104/0181303