Planar Heating Element Adjusted by Electron Beam Micromachining

0336802 - ÚPT 2011 RIV BG eng J - Journal Article
Dupák, Libor - Dupák, Jan
Planar Heating Element Adjusted by Electron Beam Micromachining.
Elektrotechnica & Elektronica. Roč. 44, 5-6 (2009), s. 82-84. ISSN 0861-4717
Institutional research plan: CEZ:AV0Z20650511
Keywords : electron beam machining * heating element
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

This paper describes a planar heating element suitable for vacuum. The basis of this element is a ceramic plate with a thin layer of titanium deposited by magnetron sputtering. The copper contacts are brazed to the opposite edges of the plate for better connection of current supplies.
Permanent Link: http://hdl.handle.net/11104/0180956