Scintillation secondary electron detector for variable pressure scanning electron microscope

0335266 - ÚPT 2010 RIV AT eng C - Conference Paper (international conference)
Čudek, P. - Jirák, Josef - Neděla, Vilém
Scintillation secondary electron detector for variable pressure scanning electron microscope.
MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. Graz: Verlag der Technischen Universität, 2009, Vol. 1: 221-222. ISBN 978-3-85125-062-6.
[MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./. Graz (AT), 30.08.2009-04.09.2009]
Institutional research plan: CEZ:AV0Z20650511
Keywords : scintillation SE detector * variable pressure SEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.univie.ac.at/asem/Graz_MC_09/papers/95710.pdf

Detection of signal electrons at a higher pressure in the specimen chamber is commonly based on ionization and scintillation type of detectors. At the ionization detector secondary and backscattered electrons are amplified in the process of impact ionization of these electrons with atoms and molecules of gases in the specimen chamber. Electrons are subsequently detected by an electrode system of the detector. Voltage up to several hundred volts is added to the electrodes of the detector to give to secondary electrons and to electrons produced at ionization collisions sufficient energy needed for ionization of gases. Last versions of this detector utilize also magnetic field and detect preferentially secondary electrons.
Permanent Link: http://hdl.handle.net/11104/0179776