Electron beam induced current measurement on a specimen biased in a cathode lens

0335265 - ÚPT 2010 RIV AT eng C - Conference Paper (international conference)
Horáček, Miroslav - Zobač, Martin - Vlček, Ivan
Electron beam induced current measurement on a specimen biased in a cathode lens.
MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. Graz: Verlag der Technischen Universität, 2009, Vol. 1: 211-212. ISBN 978-3-85125-062-6.
[MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./. Graz (AT), 30.08.2009-04.09.2009]
R&D Projects: GA AV ČR IAA100650803
Institutional research plan: CEZ:AV0Z20650511
Keywords : elektron beam induced current * SEM * very low energy electrons * cathode lens * specimen bias
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.univie.ac.at/asem/Graz_MC_09/papers/77645.pdf

The retarding potential between the specimen and an anode, a cathode lens, is already commonly used for high resolution imaging at very low electron beam energies, even below 10 eV, in a scanning electron microscope (SEM). Standard configuration consists of an electron column (either magnetic or electrostatic), YAG single-crystal scintillator positioned under the objective lens, used as an anode, and an insulated specimen used as a cathode of the cathode lens. The microscope with the cathode lens can be used not only to acquire standard signals as secondary electrons (SE) and backscattered electrons (BSE); transmitted electrons (STEM) and electron beam induced current (EBIC) can be used as well. Two problems are addressed. First, we have to bring a high voltage on the insulated specimen in the microscope chamber, and second, we have to solve the induced current measurement on the high voltage level.
Permanent Link: http://hdl.handle.net/11104/0179775