Novel instrumentation for interferometric nanoscale comparator

0335088 - ÚPT 2010 RIV US eng C - Conference Paper (international conference)
Čížek, Martin - Buchta, Zdeněk - Mikel, Břetislav - Lazar, Josef - Číp, Ondřej
Novel instrumentation for interferometric nanoscale comparator.
Optical Measurement Systems for Industrial Inspection VI. (Proceedings of SPIE Vol. 7389). Bellingham: SPIE, 2009, 73982Y: 1-7. ISBN 978-0-8194-7672-2. ISSN 0277-786X.
[Optical Measurement Systems for Industrial Inspection /6./. Munich (DE), 14.06.2009-18.06.2009]
R&D Projects: GA ČR GA102/09/1276; GA MŠMT(CZ) LC06007; GA MŠMT 2C06012; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/07/1179; GA ČR GP102/09/P630; GA AV ČR KAN311610701
Institutional research plan: CEZ:AV0Z20650511
Keywords : high resolution interferometry * laser comparator * precision displacement sensors
Subject RIV: BH - Optics, Masers, Lasers

Presented paper deals with the description of subsystems of a novel interferometric nanocomparator. High speed digital quadrature detector based on digital signal controller is used here for processing of the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and allows achievement of sub-nanometer resolution and accuracy of the laser interferometer. The refractive index of the air is computed continuously from the current atmospheric values using Edlen's formula. High dynamic range of the mirror displacement setting is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators. The linear guide way is used for open-loop coarse positioning with 50 nm accuracy and up to 100 mm of displacement. Piezoelectric actuators in servo-loop linked to the interferometer value are used for fine positioning with better than 1 nm accuracy over a 5 μm range.
Permanent Link: http://hdl.handle.net/11104/0179660