Comparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems

0335019 - FZÚ 2010 RIV DE eng J - Journal Article
Čada, Martin - Virostko, Petr - Kment, Štěpán - Hubička, Zdeněk
Comparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems.
[Porovnávací studie celkové výkonové hustoty na substrát v pulzním DC magnetronovém výboji a v plazma-jetu s dutou katodou.]
Plasma Processes and Polymers. Roč. 6, S1 (2009), S247-S252. ISSN 1612-8850. E-ISSN 1612-8869.
[International Conference on Plasma Surface Engineering /11./. Garmisch Partenkirchen, 15.09.2008-19.09.2008]
R&D Projects: GA AV ČR KAN301370701; GA AV ČR KJB100100707; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : calorimeter probe * floating substrate * magnetron * plasma jet * pulsed discharge
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 4.037, year: 2009

The pulsed DC magnetron and hollow-cathode plasma jet sources have been studied from the point of view of total energy flux density at a ‘‘floating’’ substrate. Both plasma sources were operated under identical experimental conditions and differences between both systems were investigated. The aim of this work is focused on the characterization of total power density at electrically isolated substrate for various duty cycles and for different pulsing frequencies. A calorimeter probe with incorporated thermocouple junction was used for measurement of the total power density on the substrate. The main results from the calorimeter probe show clearly that total power density at the substrate is much higher for the planar magnetron operating at low duty cycle and high pulsing frequency than for the plasma jet. The total power density measured in the planar magnetron depends more strongly on the duty cycle and the pulsing frequency than measured in the plasma jet.

Pulzní DC magnetron a plazma-jet s dutou katodou byly zkoumány z pohledu celkového energetického toku na elektricky izolovaný substrát. Oba plazmové zdroje pracovaly za stejných experimentálních podmínek. Cílem práce je charakterizace celkového energetického toku na substrát pro různé délky pracovních cyklů a pro různé pulzní frekvence. Kalorimetrická sonda byla užita k měření celkového výkonového toku na substrát.
Permanent Link: http://hdl.handle.net/11104/0179607