Er+ medium energy ion implantation into lithium niobate

0334375 - ÚJF 2010 RIV NL eng J - Journal Article
Švecová, B. - Nekvindová, P. - Macková, Anna - Oswald, Jiří - Vacík, Jiří - Grotzschel, R. - Spirkova, J.
Er+ medium energy ion implantation into lithium niobate.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 267, 8-9 (2009), s. 1332-1335. ISSN 0168-583X. E-ISSN 1872-9584
R&D Projects: GA MŠMT(CZ) LC06041; GA AV ČR IAA200480702
Institutional research plan: CEZ:AV0Z10480505; CEZ:AV0Z10100521
Keywords : lithium niobate * erbium * ion implantation
Subject RIV: BG - Nuclear, Atomic and Molecular Physics, Colliders
Impact factor: 1.156, year: 2009

Erbium-doped lithium niobate (Er: LiNbO3) is a prospective photonics component, operating at 1.5 m, which could find its use chiefly as an optical amplifier or waveguide laser. In this study, we have focused on the properties of the optically active Er: LiNbO3 layers, which are fabricated by medium energy ion implantation under various experimental conditions. Erbium ions were implanted at energies of 330 and 500 keV with fluences of 1.0x1015, 2.5x1015 and 1.0x1016 cm-2 into LiNbO3 single-crystalline cuts of various orientations. The as-implanted samples were annealed in air at 350 °C for 5 h. The depth distribution and diffusion profiles of the implanted Er were measured by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. The projected range RP and projected range straggling RP were calculated employing the SRIM code. The damage distribution and structural changes were described usány the RBS/channelling method.
Permanent Link: http://hdl.handle.net/11104/0179126