Local probe microscopy with interferometric monitoring of the stage nanopositioning

0330674 - ÚPT 2010 RIV GB eng J - Journal Article
Lazar, Josef - Klapetek, P. - Číp, Ondřej - Čížek, Martin - Šerý, Mojmír
Local probe microscopy with interferometric monitoring of the stage nanopositioning.
Measurement Science and Technology. Roč. 20, č. 8 (2009), 084007: 1-6. ISSN 0957-0233. E-ISSN 1361-6501
R&D Projects: GA AV ČR IAA200650504; GA MŠMT 2C06012; GA MŠMT(CZ) LC06007; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/07/1179
Institutional research plan: CEZ:AV0Z20650511
Keywords : interferometry * local probe microscopy * nanometrology * nanoscale * surface probe microscopy (SPM) * atomic force microscopy (AFM) * nanopositioning interferometry
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.317, year: 2009

We present a system of positioning and interferometric monitoring of a sample position for measurements and calibration in the nanoscale in metrology. The positioning is based on a three-axis stage which allows replacing scanning by the probe of an atomic force microscope with a system with full interferometric displacement measurement. A stage with 200 μm × 200 μm of horizontal travel extends also the microscope range. The stage allows positioning with sub-nanometer resolution in all three axes under a closed loop control with position detection via capacitive sensors. Interferometric system monitoring all six degrees of freedom of the stage ensures full metrological traceability of the positioning to the fundamental etalon of length and improves resolution and overall precision of the displacement monitoring.
Permanent Link: http://hdl.handle.net/11104/0176405