Hybrid laser - magnetron technology for carbon composite coating

0330295 - FZÚ 2010 RIV RU eng J - Journal Article
Jelínek, Miroslav - Kocourek, Tomáš - Kadlec, J. - Zemek, Josef
Hybrid laser - magnetron technology for carbon composite coating.
[Hybridní laser - magnetronová technologie pro kompozitní uhlíkové vrstvy.]
Laser Physics. Roč. 19, č. 2 (2009), 149-153. ISSN 1054-660X. E-ISSN 1555-6611
R&D Projects: GA ČR GA202/06/0216; GA ČR GA202/07/0591
Institutional research plan: CEZ:AV0Z10100522; CEZ:AV0Z10100521
Keywords : SiC * thin films * PLD * hybrid deposition * composites
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.676, year: 2009

Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm 2 were prepared. Crystalline TiC films were grown at room substrate temperature Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings.

Byl vyvinut a testován hybridní laser-magnetronový depoziční systém pro studium tenkých vrstev na bázi uhlíku. Byly testovány různé geometrické konfigurace a depoziční podmínky. Byly syntetizovány vrstvy TiC, TiCN a SiC. Vrstvy byly připraveny v argonu (TiC), ve směsi argonu a dusíku (TiCN) nebo argonu/vodíku (Sic). Vlastnosti vrstev byly studovány pomocí SEM, XRD, GDOES a XPS. Byly připraveny hladké, homogenní vrstvy o ploše 9 cm2. Krystalické TiC vrstvy byly připraveny za pokojové teploty.
Permanent Link: http://hdl.handle.net/11104/0176119