Number of the records: 1
Large area deposition of Pb(Zr,Ti)O.sub.3./sub. thin films for piezoelectric MEMS
- 1.0306540 - FZÚ 2008 RIV US eng J - Journal Article
Suchaneck, G. - Vidyarthi, V.S. - Reibold, M. - Deyneka, Alexander - Jastrabík, Lubomír - Gerlach, G. - Hartung, J.
Large area deposition of Pb(Zr,Ti)O3 thin films for piezoelectric MEMS.
[Velkoplošná depozice tenkých vrstev Pb(Zr,Ti)O3 pro piezoelektrické MEMS.]
Journal of Electroceramics. Roč. 20, - (2008), s. 17-20. ISSN 1385-3449. E-ISSN 1573-8663
Institutional research plan: CEZ:AV0Z10100522; CEZ:AV0Z10100521
Keywords : ferroelectric thin films * PZT * high resolution transmission electron microscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.990, year: 2008 ; AIS: 0.551, rok: 2008
Permanent Link: http://hdl.handle.net/11104/0159533
Number of the records: 1