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Advances in Imaging and Electron Physics

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    0205556 - UPT-D 20020106 RIV US eng M - Monography Chapter
    Frank, Luděk
    Advances in scanning electron microscopy.
    Advances in Imaging and Electron Physics., s. 327 - 373
    R&D Projects: GA ČR GA202/99/0008
    Institutional research plan: CEZ:AV0Z2065902
    Keywords : scanning electron microscopy * electron optics * instrumens for study of surfaces
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

    The monograph defines a configuration, construction and electron optical parameters of a standard scanning electron microscope and it defines and analyses new principals and approaches towards this standard. All aspects of the device are dealt with including the detection system, mechanization of the construction, vacuum and control electronics. The attention is devoted to new trends, which are: microscopy at higher pressure, microscopy byvery slow electrons and multi-channel signal detection.
    Permanent Link: http://hdl.handle.net/11104/0101169

     
     

Number of the records: 1