Scanning Electron Microscopy of Nonconductive Specimens at Critical Energies in a Cathode Lens System

0205377 - UPT-D 20010016 RIV US eng J - Journal Article
Frank, Luděk - Zadražil, Martin - Müllerová, Ilona
Scanning Electron Microscopy of Nonconductive Specimens at Critical Energies in a Cathode Lens System.
Scanning. Roč. 23, č. 1 (2001), s. 36-50. ISSN 0161-0457. E-ISSN 1932-8745
R&D Projects: GA ČR GA202/96/0961; GA ČR GA202/99/0008
Institutional research plan: CEZ:AV0Z2065902
Keywords : scanning electron microscopy * specimen charging * nonconductive specimens
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 0.389, year: 2001

A method for scanning electron microscopy imaging of nonconductive specimens, based on measurement and utilisation of a critical energy, is described in detail together with examples of its application. The critical energy, at which the total electron yield curve crosses the unit level, is estimated on the basis of measurement of the image signal development from the beginning of irradiation. This approach, concentrated onto the detected signal as the only quantity crucial for the given purpose of acquiring a noncharged micrograph, evades consequences of any changes in an irradiated specimen that influence the total electron yield curve and possibly also the critical energy value. Implementation of the automated method, realised using a cathode lens-equipped scanning electron microsope (SEM), enables one to establish a mean rate of charging over the field of view and its dependence on the electron landing energy. This dependence enables one to determine the energy of a minimum damage of the image of the given field of view. Factors influencing reliability and applicability of the method are discussed and examples of noncharged micrographs of specimens from both life and material science fields are presented.
Permanent Link: http://hdl.handle.net/11104/0100991