Number of the records: 1
CO2 Laser Photosensitized Decomposition of Diethylsilane for Deposition of SiXC1-X Coatings
- 1.0164773 - UCHP-M 950113 US eng A - Abstract
Jakoubková, Marie - Bastl, Zdeněk - Šubrt, Jan - Pokorná, Dana - Fajgar, Radek - Pola, Josef
CO2 Laser Photosensitized Decomposition of Diethylsilane for Deposition of SiXC1-X Coatings.
ROMOPTO '94. Conference in Optics. Proceedings Series SPIE. Vol. 2461. Bellingham: SPIE, 1994 - (Vlad, V.). s. 121-123. ISBN 0-8194-1813-7.
[Conference in Optics ROMOPTO 94 /4./. 05.09.1994-08.09.1994, Bellingham]
R&D Projects: GA AV ČR IA47265
Permanent Link: http://hdl.handle.net/11104/0061982
Number of the records: 1