0134480 - FZU-D 20030380 RIV CZ eng M - Monography Chapter
Tipek, A. - Ripka, P. - Hulicius, Eduard - Hospodková, Alice - Neužil, P.
New technologies and materials.
Master Book on Sensors. Praha: BENtechnical literature, 2003 - (Ripka, P.; Tipek, A.), s. 11-1 - 11-74. ISBN 80-7300-129-2
Institutional research plan: CEZ:AV0Z1010914
Keywords : micro-electro-mechanical systems * sensors * actuators * microfabrication
Subject RIV: BM - Solid Matter Physics ; Magnetism

The book is final product of Leonardo pilot project "Modular Courses on Modern Sensors"(CZ/PP-131026). More about the project can be found at http://sensor.feld.cvut.cz/leonardo. MEMS is an abbreviation for "Micro-Electron-Mechanical Systems"or very small sensors, actuators and operating electronics on a common silicon substrate with the use of microfabrication technology.

Permanent Link: http://hdl.handle.net/11104/0032381