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Investigation of the atmospheric RF torch-barrier plasma jet for deposition of CeO.sub.x./sub. thin films

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    0134424 - FZU-D 20030324 RIV NL eng J - Journal Article
    Soukup, Ladislav - Hubička, Zdeněk - Churpita, Olexandr - Čada, Martin - Pokorný, Petr - Zemek, Josef - Jurek, Karel - Jastrabík, Lubomír
    Investigation of the atmospheric RF torch-barrier plasma jet for deposition of CeOx thin films.
    Surface and Coatings Technology. 169-170, - (2003), s. 571-574. ISSN 0257-8972. E-ISSN 1879-3347
    R&D Projects: GA AV ČR IBS1010203; GA ČR GA202/00/1592; GA MŠMT LN00A015
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : atmospheric plasma jet * cerium oxide thin films * emission spectroscopy
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 1.410, year: 2003

    An atmospheric presssure RF torch-barrier discharge system with flowing plasma jet channel was studied as a tool for coatings of aluminium substrates by CeOx thin films. Cerium presursors were supplied to the plasma jet in the form of aerosol of the water solution of cerium salts. "In situ" emission spectroscopy of active plasma jet channel was performed in order to obtain more parameters about atmospheric plasma jet channel.
    Permanent Link: http://hdl.handle.net/11104/0032327
     

Number of the records: 1  

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