Number of the records: 1
Probe diagnostics of the RF barrier-torch discharge at atmospheric pressure
- 1.0134423 - FZU-D 20030323 RIV NL eng J - Journal Article
Čada, Martin - Hubička, Zdeněk - Šícha, Miloš - Churpita, Olexandr - Jastrabík, Lubomír - Soukup, Ladislav - Tichý, M.
Probe diagnostics of the RF barrier-torch discharge at atmospheric pressure.
Surface and Coatings Technology. 174-175, - (2003), s. 530-534. ISSN 0257-8972
R&D Projects: GA AV ČR IBS1010203; GA ČR GA202/00/1592
Grant - others:GA UK(CZ) 173/2002BFYZ
Institutional research plan: CEZ:AV0Z1010914
Keywords : atmospheric barrier-torch * Langmuir probe * double probe
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.410, year: 2003
We present measurements of the electron temperature Te in the RF barrier-torch discharge by means of the planar RF-compensated Langmuir probe. The probe was mounted at the substrate position. The natural gas temperature has been measured by optical diagnostics and found to be 400-800K. The plasma of the RF barrier-torch discharge is therefore strongly non-isothermal even at such high operation pressure.
Permanent Link: http://hdl.handle.net/11104/0032326
Number of the records: 1