0134386 - FZU-D 20030284 RIV RU eng J - Journal Article
Jelínek, Miroslav - Kocourek, Tomáš - Kadlec, J. - Bulíř, Jiří
Gradient titanium-carbon layers grown by pulsed laser deposition combined with magnetron sputtering.
Laser Physics. Roč. 13, č. 10 (2003), s. 1330-1333. ISSN 1054-660X. E-ISSN 1555-6611
R&D Projects: GA AV ČR IAA1010110
Institutional research plan: CEZ:AV0Z1010914
Keywords : thin films * hybrid deposition * TiC
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.765, year: 2003

Gradient titanium-carbon films were grown by a combination of laser ablation and magnetron sputerring. A laser is used for the deposition of carbon films. Simultaneously, titanium was magnetron sputtered onto tha same substrate. Laers were created for various deposition regimes.The geometrical configuration used and growth regimes and thickness profile distribution are presented.
Permanent Link: http://hdl.handle.net/11104/0032290