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Energy-resolved mass spectroscopy of Ar-C.sub.2./sub.H.sub.2./sub.-N.sub.2./sub. plasma, performed during ion plating of TiC and Ti N hard coatings

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    0134359 - FZU-D 20030257 RIV NL eng J - Journal Article
    Maček, M. - Mišina, Martin - Čekada, M. - Panjan, P.
    Energy-resolved mass spectroscopy of Ar-C2H2-N2 plasma, performed during ion plating of TiC and Ti N hard coatings.
    Surface and Coatings Technology. 174-175, - (2003), s. 943-946. ISSN 0257-8972. E-ISSN 1879-3347.
    [International Conference on Plasma Surface Engineering /11./. Garmisch-Partenkirchen, 09.09.2002-13.09.2002]
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : energy-resolved mass spectroscopy * Ar-C2H2-N2 plasma * ion plating
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 1.410, year: 2003

    Energy resolved mass spectroscopy studies during the discharge in Ar+N2+C2H2 gas mixture in a triode ion plating apparatus Balzers BAI 730 reveals a high degree of acetylene decomposition under typical condition suitable for Cr and Ti evaporation. The most abundant neutral species beside Ar in the case of Ar+C2H2 gas mixture is hydrogen and acetylene as could be expected.
    Permanent Link: http://hdl.handle.net/11104/0032264

     
     

Number of the records: 1  

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