0134359 - FZU-D 20030257 RIV NL eng J - Journal Article
Maček, M. - Mišina, Martin - Čekada, M. - Panjan, P.
Energy-resolved mass spectroscopy of Ar-C₂H₂-N₂ plasma, performed during ion plating of TiC and Ti N hard coatings.
Surface and Coatings Technology. 174-175, - (2003), s. 943-946. ISSN 0257-8972.
[International Conference on Plasma Surface Engineering /11./. Garmisch-Partenkirchen, 09.09.2002-13.09.2002]
Institutional research plan: CEZ:AV0Z1010914
Keywords : energy-resolved mass spectroscopy * Ar-C₂H₂-N₂ plasma * ion plating
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.410, year: 2003

Energy resolved mass spectroscopy studies during the discharge in Ar+N₂+C₂H₂ gas mixture in a triode ion plating apparatus Balzers BAI 730 reveals a high degree of acetylene decomposition under typical condition suitable for Cr and Ti evaporation. The most abundant neutral species beside Ar in the case of Ar+C₂H₂ gas mixture is hydrogen and acetylene as could be expected.
Permanent Link: http://hdl.handle.net/11104/0032264