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Study of thin films tin oxide chemical sensors created by Laser-CVD and PLD techniques

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    0134068 - FZU-D 20020357 RIV US eng C - Conference Paper (international conference)
    Santoni, A. - Lančok, Ján - Pensa, M. - Vysloužil, F. - Jelínek, Miroslav - Menicucci, I. - Myslík, V.
    Study of thin films tin oxide chemical sensors created by Laser-CVD and PLD techniques.
    0-8194-4528-2. In: Advanced Laser Technologies. Bellingham: SPIE International Society for Optical Engineering, 2002 - (Dimitras, D.; Dinescu, M.; Konov, V.), s. 139-143. Proceedings of SPIE., 4762. ISSN 0277-786X.
    [ALT'01 International Conference on Advanced Laser Technologies. Constanta (RO), 11.09.2001-14.09.2001]
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : tin oxide thin films * chemical sensors * L-CVD
    Subject RIV: BM - Solid Matter Physics ; Magnetism

    Tin oxide thin films based chemical sensors have been developed by means of laser induced chemical vapor deposition and pulsed laser deposition methods. The sensitivity to hydrogen was mesured and compared. An improvement of the sensitivity by using noble metal catalysts was observed.
    Permanent Link: http://hdl.handle.net/11104/0032005
     

Number of the records: 1  

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