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Hybrid laser deposition techniques: overview and experinces

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    0133829 - FZU-D 20020008 RIV GB eng J - Journal Article
    Jelínek, Miroslav - Lančok, Ján - Bulíř, Jiří - Novotný, Michal
    Hybrid laser deposition techniques: overview and experinces.
    Laser Physics. Roč. 12, č. 2 (2002), s. 306-309. ISSN 1054-660X. E-ISSN 1555-6611
    Institutional research plan: CEZ:AV0Z1010914
    Keywords : hybrid PLD * CNx * TiN
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 0.798, year: 2002

    Overview of combinatin of pulsed laser deposition method (PLD) with additional discharges or deposition techniques is given. Improvement of properties of thin films created by such hybrid PLD technology is mentioned.
    Permanent Link: http://hdl.handle.net/11104/0031784

     
     

Number of the records: 1  

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