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Hybrid laser deposition techniques: overview and experinces
- 1.0133829 - FZU-D 20020008 RIV GB eng J - Journal Article
Jelínek, Miroslav - Lančok, Ján - Bulíř, Jiří - Novotný, Michal
Hybrid laser deposition techniques: overview and experinces.
Laser Physics. Roč. 12, č. 2 (2002), s. 306-309. ISSN 1054-660X. E-ISSN 1555-6611
Institutional research plan: CEZ:AV0Z1010914
Keywords : hybrid PLD * CNx * TiN
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.798, year: 2002
Overview of combinatin of pulsed laser deposition method (PLD) with additional discharges or deposition techniques is given. Improvement of properties of thin films created by such hybrid PLD technology is mentioned.
Permanent Link: http://hdl.handle.net/11104/0031784
Number of the records: 1