Nondestructive investigatons of the depth profile of PZT ferroelectric films

0133692 - FZU-D 20010492 RIV GB eng J - Journal Article
Deineka, Alexander - Glinchuk, M. D. - Jastrabík, Lubomír - Suchaneck, G. - Gerlach, G.
Nondestructive investigatons of the depth profile of PZT ferroelectric films.
Ferroelectrics. Roč. 264, - (2001), s. 151-156. ISSN 0015-0193. E-ISSN 1563-5112
R&D Projects: GA MŠMT LN00A015; GA ČR GA202/00/1425
Institutional research plan: CEZ:AV0Z1010914
Keywords : ferroelectric film * depth profile * interface
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.471, year: 2001

Investigations of PbZr_0.235O3 (PZT) films of perovskite (pe) and pyrochlore (py) structure deposited onto Si/Si/O_{2/ adhesion layer/(111) Pt substrate by RF sputtering were performed with J. A. Woollam spectral ellipsometer. Experimental data were compared with theoretical predictions.
Permanent Link: http://hdl.handle.net/11104/0031654}