CN.sub.x./sub. coatings deposited by pulsored RF supersonic plasma jet: hardness, nitrogenation and optical properties

0133425 - FZU-D 20010277 RIV NL eng J - Journal Article
Hubička, Zdeněk - Šícha, Miloš - Pajasová, Libuše - Soukup, Ladislav - Jastrabík, Lubomír - Chvostová, Dagmar - Wagner, T.
CN_x coatings deposited by pulsored RF supersonic plasma jet: hardness, nitrogenation and optical properties.
Surface and Coatings Technology. 142-144, - (2001), s. 681-687. ISSN 0257-8972
R&D Projects: GA ČR GA202/00/1592; GA MŠMT LN00A015
Institutional research plan: CEZ:AV0Z1010914
Keywords : carbon nitrides * plasma-chemical deposition * tribology * optical properties
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.236, year: 2001

A low pressure pulsed RF supersonic plasma jet system (RPJ) has been used for deposition of CN_{x thin films. The aim of the CN}x thin films deposition was an application for tribological coatings. Chemical composition, mechanical and optical properties of deposited CN_{x films have been measured. The mechanism of CN}x formation has been studied as well.
Permanent Link: http://hdl.handle.net/11104/0031394