0133327 - FZU-D 20010122 RIV DE eng J - Journal Article
Zambov, L. M. - Popov, C. - Plass, M. F. - Bock, A. - Jelínek, Miroslav - Lančok, Ján - Masseli, K. - Kulisch, W.
Capacitance humidity sensor with carbon nitride detecting element.
Applied Physics A - Materials Science & Processing. Roč. 70, - (2000), s. 603-606. ISSN 0947-8396. E-ISSN 1432-0630
Institutional research plan: CEZ:AV0Z1010914
Keywords : carbon nitride films * humidity sensor * pulsed laser deposition * inductively coupled plasma chemical vapour deposition
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.613, year: 2000

The humidity sensitive properties of carbon nitride (CNx) films deposited by two methods, inductively coupled chemical vapour deposition utilizing transport reactions and pulsed laser depostion combined with an rf discharge, have been investigated.
Permanent Link: http://hdl.handle.net/11104/0000614