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RF and DC plasma assisted laser deposition of a-CN.sub.x./sub. thin films

  1. 1.
    0132514 - FZU-D 990464 RIV US eng C - Conference Paper (international conference)
    Tomov, R. I. - Jelínek, Miroslav - Bulíř, Jiří
    RF and DC plasma assisted laser deposition of a-CNx thin films.
    Tenth International School on Quantum Electronics: Laser Physics and Applications. Bellingham: SPIE The International Society for Optical Engineering, 1999 - (Atanosov, P.; Stoyanov, D.), s. 344-348. Proceedings of the SPIE., 3571. ISSN 0277-786X.
    [International School on Quantum Eklecttronics: Laser Physics and Aplications /10./. Varna (BG), 21.09.1998-25.09.1998]
    R&D Projects: GA ČR GA202/93/0464
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Permanent Link: http://hdl.handle.net/11104/0030534
     

Number of the records: 1  

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